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DC poleHodnotaJazyk
dc.contributor.authorKadlečíková, M.
dc.contributor.authorVančo, Ĺ
dc.contributor.authorBreza, J.
dc.contributor.authorPriesol, J.
dc.contributor.authorŠatka, A.
dc.contributor.editorPihera, Josef
dc.contributor.editorSteiner, František
dc.date.accessioned2019-02-21T12:47:35Z
dc.date.available2019-02-21T12:47:35Z
dc.date.issued2018
dc.identifier.citationElectroscope. 2018, č. 1.cs
dc.identifier.issn1802-4564
dc.identifier.urihttp://147.228.94.30/images/PDF/Rocnik2018/Cislo1_2018/r12c1c15.pdf
dc.identifier.urihttp://hdl.handle.net/11025/31008
dc.description.sponsorshipWe are grateful to the scientific grant agency of the Ministry of Education, Science, Research and Sport of the Slovak Republic for financial support of project VEGA No. 1/0947/16.en
dc.format2 s.cs
dc.format.mimetypeapplication/pdf
dc.language.isoenen
dc.publisherZápadočeská univerzita v Plzni, Fakulta elektrotechnickács
dc.relation.ispartofseriesElectroscopecs
dc.rightsCopyright © 2018 Electroscope. All Rights Reserved.en
dc.subjectRamanova spektroskopiecs
dc.subjectmikroelektronické strukturycs
dc.subjecttenké vrstvycs
dc.subjectzkoušení materiálucs
dc.titleRaman spectroscopy used to assess the temperature and mechanical stress in thin films of microelectronic structuresen
dc.typečlánekcs
dc.typearticleen
dc.rights.accessopenAccessen
dc.type.versionpublishedVersionen
dc.description.abstract-translatedIn this experimental work we examined the temperature and mechanical stress in the thin films of microelectronic structures based on GaN and AlN by Raman spectroscopy. The rise in temperature in the Raman spectrum is shown by shifting the Raman bands toward lower wavenumbers. Similarly like with changes of temperature, the changes of the positions of Raman bands may indicate the changes of mechanical stress in the structure. It was confirmed experimentally that in the case of tensile stress the Raman bands are shifted towards lower wavenumbers, and under compressive stress to higher wavenumbers.en
dc.subject.translatedRaman spectroscopyen
dc.subject.translatedmicroelectronic structuresen
dc.subject.translatedthin filmsen
dc.subject.translatedmaterial testingen
dc.type.statusPeer-revieweden
Vyskytuje se v kolekcích:Číslo 1 (2018)
Číslo 1 (2018)

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Použijte tento identifikátor k citaci nebo jako odkaz na tento záznam: http://hdl.handle.net/11025/31010

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  1. DSpace at University of West Bohemia
  2. Publikace ZČU / UWB Publications
  3. Časopisy ZČU / UWB Journals
  4. Electroscope
  5. Ročník 2018
  6. Číslo 1 (2018)