| Title: | Optical pressure sensors in LTCC technology |
| Authors: | Somer, Jakub Urban, František Urban, František Szendiuch, Ivan |
| Citation: | Electroscope. 2016, č. 1. |
| Issue Date: | 2016 |
| Publisher: | Západočeská univerzita v Plzni, Fakulta elektrotechnická |
| Document type: | článek article |
| URI: | http://147.228.94.30/images/PDF/Rocnik2016/Cislo1_2016/r10c1c4.pdf http://hdl.handle.net/11025/17668 |
| ISSN: | 1802-4564 |
| Keywords: | optické snímače tlaku;Fabry-Parotův rezonátor;braggovská mřížka;LTCC keramická struktura |
| Keywords in different language: | optical pressure sensors;Fabry-Parot resonator;fiber bragg grating;LTCC ceramic structure |
| Abstract in different language: | This paper deals with the design, manufacturing and measurement of optical pressure sensors developed in Low Temperature Co-fired Ceramic technology. Tw o types of the optical measurement methods were used for the pressure sensing. The first method is based on the distance measurement using Fabry Perot resonator. The second type of pressure transducer is based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. LTCC ceramic structure with membrane was used for the forming of a pressure transducer. Both of the sensor types were designed to measure pressure in range of ± 0,5 bar difference atmospheric pressure. |
| Rights: | Copyright © 2015 Electroscope. All Rights Reserved. |
| Appears in Collections: | Číslo 1 (2016) Číslo 1 (2016) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| r10c1c4.pdf | Plný text | 459,58 kB | Adobe PDF | View/Open |
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