|Estimation of mechanical parameters of thin films using finite element analysis
|Tinoco, H. A.
|20th International Conference Applied Mechanics 2018: April 9-11, 2018, Myslovice, Czech republic: conference proceedings, p. 157-162.
|Západočeská univerzita v Plzni
|test výstřelu;tenký film;analýza konečných prvků;elastické vlastnosti
|Keywords in different language:
|bulge test;thin film;finite element analysis;elastic properties
|Abstract in different language:
|This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge test and a numerical approach. The methodology is based on the combination of finite element analysis with a classical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mm with the aim to approximate both the load-deflection curves experimentally measured and the classical load-deflection analytical model. Error functions were constructed and minimized to delimit a coupled solution space between Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic properties can be determined due to that there is not unique solution in the estimations of these parameters. However, both elastic parameters were determined through the proposed numerical procedure which compares the deformed surfaces for a specific set of optimal elastic parameters computed. Results show that the estimated elastic properties agree with corresponding values determined by other methods in the literature.
|© Západočeská univerzita v Plzni
|Appears in Collections:
|Applied mechanics 2018
Applied mechanics 2018
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