Title:	Thermal behaviour of magnetron sputtered tungsten and tungsten-boride thin films
Authors:	Avotina, Liga Bumbure, Lada Goldmane, Annija Elizabete Vanags, Edgars Romanova, Marina Sorokins, Hermanis Zaslavskis, Aleksandrs Kizane, Gunta Dekhtyar, Yuri
Citation:	2022 International Conference on Applied Electronics: Pilsen, 6th – 7th September 2022, Czech Republic, p. 29-32.
Issue Date:	2022
Publisher:	Fakulta elektrotechnická ZČU
Document type:	konferenční příspěvek conferenceObject
URI:	http://hdl.handle.net/11025/49845
ISBN:	978-1-6654-9482-3
Keywords:	wolfram;borid wolframu;nanofilmy;tepelné zpracování;tepelně stimulovaná emise exoelektronů
Keywords in different language:	tungsten;tungsten diboride;nanofilms;thermal treatment;thermally stimulated exoelectron emission
Abstract in different language:	Magnetron sputtered tungsten and tungsten diboride nanofilms are proposed to be used in microelectronic devices. Methods of deposition for nanofilms on oxidized silicon followed by etching is among the techniques to be applied for production. However, physical-chemical interactions between various films need to be taken into account. Therefore, a complete surface and in-depth characterization of synthesized films is necessary. Tungsten and tungsten diboride nanofilms are deposited by magnetron sputtering technique, followed by plasma chemical and chemical etching. Characterization of the structures is separated in several main steps including surface morphology, analysis of element composition as well as characterization of thermal properties, including estimation of presence of thermally active emission centers and thermally induced chemical conversions.
Rights:	© IEEE
Appears in Collections:	Applied Electronics 2022 Applied Electronics 2022

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