Title: | Thermal behaviour of magnetron sputtered tungsten and tungsten-boride thin films |
Authors: | Avotina, Liga Bumbure, Lada Goldmane, Annija Elizabete Vanags, Edgars Romanova, Marina Sorokins, Hermanis Zaslavskis, Aleksandrs Kizane, Gunta Dekhtyar, Yuri |
Citation: | 2022 International Conference on Applied Electronics: Pilsen, 6th – 7th September 2022, Czech Republic, p. 29-32. |
Issue Date: | 2022 |
Publisher: | Fakulta elektrotechnická ZČU |
Document type: | konferenční příspěvek conferenceObject |
URI: | http://hdl.handle.net/11025/49845 |
ISBN: | 978-1-6654-9482-3 |
Keywords: | wolfram;borid wolframu;nanofilmy;tepelné zpracování;tepelně stimulovaná emise exoelektronů |
Keywords in different language: | tungsten;tungsten diboride;nanofilms;thermal treatment;thermally stimulated exoelectron emission |
Abstract in different language: | Magnetron sputtered tungsten and tungsten diboride nanofilms are proposed to be used in microelectronic devices. Methods of deposition for nanofilms on oxidized silicon followed by etching is among the techniques to be applied for production. However, physical-chemical interactions between various films need to be taken into account. Therefore, a complete surface and in-depth characterization of synthesized films is necessary. Tungsten and tungsten diboride nanofilms are deposited by magnetron sputtering technique, followed by plasma chemical and chemical etching. Characterization of the structures is separated in several main steps including surface morphology, analysis of element composition as well as characterization of thermal properties, including estimation of presence of thermally active emission centers and thermally induced chemical conversions. |
Rights: | © IEEE |
Appears in Collections: | Applied Electronics 2022 Applied Electronics 2022 |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
uvod.pdf | Plný text | 1,61 MB | Adobe PDF | View/Open |
Thermal_behaviour_of_magnetron_sputtered_tungsten_and_tungsten-boride_thin_films.pdf | Plný text | 1,9 MB | Adobe PDF | View/Open |
Please use this identifier to cite or link to this item:
http://hdl.handle.net/11025/49845
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.