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DC poleHodnotaJazyk
dc.contributor.authorHlína, Jiří
dc.contributor.authorŘeboun, Jan
dc.contributor.authorJanda, Martin
dc.contributor.authorHamáček, Aleš
dc.date.accessioned2023-01-16T11:00:19Z-
dc.date.available2023-01-16T11:00:19Z-
dc.date.issued2022
dc.identifier.citationHLÍNA, J. ŘEBOUN, J. JANDA, M. HAMÁČEK, A. Study of Internal Stress in Conductive and Dielectric Thick Films. Materials, 2022, roč. 15, č. 23, s. 1-12. ISSN: 1996-1944cs
dc.identifier.issn1996-1944
dc.identifier.uri2-s2.0-85143747369
dc.identifier.urihttp://hdl.handle.net/11025/50955
dc.format12 s.cs
dc.format.mimetypeapplication/pdf
dc.language.isoenen
dc.publisherMDPIen
dc.relation.ispartofseriesMaterialsen
dc.rights© authorsen
dc.titleStudy of Internal Stress in Conductive and Dielectric Thick Filmsen
dc.typečlánekcs
dc.typearticleen
dc.rights.accessopenAccessen
dc.type.versionpublishedVersionen
dc.description.abstract-translatedThis paper is focused on the study of internal stress in thick films used in hybrid microelectronics. Internal stress in thick films arises after firing and during cooling due to the differing coefficients of thermal expansion in fired film and ceramic substrates. Different thermal expansions cause deflection of the substrate and in extreme cases, the deflection can lead to damage of the substrate. Two silver pastes and two dielectric pastes, as well as their combinations, were used for the experiments, and the internal stress in the thick films was investigated using the cantilever method. Further experiments were also focused on internal stress changes during the experiment and on the influence of heat treatment (annealing) on internal stress. The results were correlated with the morphology of the fired thick films. The internal stress in the thick films was in the range of 8 to 21 MPa for metallic films and in the range from 12 to 16 MPa for dielectric films. It was verified that the cantilever method can be successfully used for the evaluation of internal stress in thick films. It was also found that the values of deflection and internal stress are not stable after firing, and they can change over time, mainly for metallic thick films.en
dc.subject.translatedthick filmen
dc.subject.translatedsilveren
dc.subject.translateddielectricen
dc.subject.translatedinternal stressen
dc.subject.translatedceramicsen
dc.subject.translatedcantilever methoden
dc.identifier.doi10.3390/ma15238686
dc.type.statusPeer-revieweden
dc.identifier.document-number897399000001
dc.identifier.obd43937695
dc.project.IDEF18_069/0009855/Elektrotechnické technologie s vysokým podílem vestavěné inteligencecs
dc.project.IDFW01010067/Pokročilé keramické materiály a technologie pro výkonovou elektroniku POKERcs
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