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Results 1-10 of 16 (Search time: 0.007 seconds).
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Title
Author(s)
2020
Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution
Pajdarová, Andrea Dagmar
;
Kozák, Tomáš
;
Hubička, Zdeněk
;
Čada, Martin
;
Mareš, Pavel
;
Čapek, Jiří
2020
Distribution of O atoms on partially oxidized metal targets, and the consequences for reactive sputtering of individual metal oxides
Houška, Jiří
;
Kozák, Tomáš
2020
Bixbyite-Ta2N2O film prepared by HiPIMS and postdeposition annealing: Structure and properties
Čapek, Jiří
;
Batková, Šárka
;
Matas, Martin
;
Kos, Šimon
;
Kozák, Tomáš
;
Haviar, Stanislav
;
Houška, Jiří
;
Schusser, Jakub
;
Minár, Jan
;
Dvořák, Filip
;
Zeman, Petr
2020
Nanoindentation and microbending analyses of glassy and crystalline Zr(–Hf)–Cu thin-film alloys
Haviar, Stanislav
;
Kozák, Tomáš
;
Meindlhumer, Michael
;
Zítek, Michal
;
Opatová, Kateřina
;
Kučerová, Ludmila
;
Keckes, Jozef
;
Zeman, Petr
2020
Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude
Kozák, Tomáš
;
Pajdarová, Andrea Dagmar
;
Čada, Martin
;
Hubička, Zdeněk
;
Mareš, Pavel
;
Čapek, Jiří
2021
Phase formation and mechanical properties of reactively and non-reactively sputtered Ti-B-N hard coatings
Hahn, R.
;
Tymoszuk, A.
;
Wojcik, T.
;
Kirnbauer, A.
;
Kozák, Tomáš
;
Čapek, Jiří
;
Sauer, M.
;
Foelske, A.
;
Hunold, O.
;
Polcik, P.
;
Mayrhofer, P.H.
;
Riedl, H.
2021
Synergy of experiment and model for reactive HiPIMS: effect of discharge parameters on WOx composition and deposition rate
Rezek, Jiří
;
Kozák, Tomáš
;
Kumar, Nirmal
;
Haviar, Stanislav
2021
Effect of exit-orifice diameter on Cu nanoparticles produced by gas-aggregation source
Batková, Šárka
;
Kozák, Tomáš
;
Haviar, Stanislav
;
Mareš, Pavel
;
Čapek, Jiří
2021
High deposition rate films prepared by reactive HiPIMS
Mareš, Pavel
;
Dubau, M.
;
Polášek, Jan
;
Mates, Tomáš
;
Kozák, Tomáš
;
Vyskočil, Jiří
2022
The importance of discharge voltage in DC magnetron sputtering for energy of sputtered and backscattered atoms on the substrate: Monte-Carlo simulations
Farhadizadeh, Alireza
;
Kozák, Tomáš
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Type
Author
8
Čapek, Jiří
5
Zeman, Petr
4
Haviar, Stanislav
4
Mareš, Pavel
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Subject
5
HiPIMS
2
bipolar HiPIMS
2
bipolární HiPIMS
2
Deposition rate
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Type
16
článek
Date issued
3
2023
2
2022
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2021
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2020
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