We report the discharge characteristics, and population of chosen atomic neutral (V, O and Ar) and ionic (V+, V2+, O+, and Ar+) species in the discharge during low-temperature (350 °C) depositions of W-doped VOx films onto a 170 nm thick Y-stabilized ZrO2 layer on a 1...

This Ph.D. thesis reports on the research and development of new materials and testing them for hydrogen gas detection. For this purpose, the tungsten oxide-based thin films were synthesized combined with other materials in order to improve the sensing properties of the tungsten ox...

This Ph.D. thesis reports on investigation of the high-temperature behavior of binary ZrCu, ternary ZrHfCu and quaternary ZrHfAl/SiCu TFMGs and senary Hf-B-Si-Y/Ho-C-N ceramic films, and on preparation and characterization of thin-film alloys from the binary WZr system. Chapter I is&#x...

Materials from the Ta-O-N system offer very promising properties in terms of hydrogen production via light-induced water splitting. This Ph.D. thesis deals with the preparation and systematic investigation of Ta-O-N films with very finely-tuned elemental composition. Because it should be possible...

The thesis is dedicated to magnetron sputtering of flexible hard alloy films, comprehension of the complicacy of their formation and the relation of the properties of the films with the deposition conditions. The text is divided into six chapters. Chapter 1 is a general ...